The Effect of Substrate Temperature on Optical Constants and Refractive Index Dispersion of DC Sputtered ZnO Thin Films


Zinc oxide (ZnO) thin films were prepared by DC- magnetron sputtering technique on glass at different substrates temperature from 350 to 550 oC in 50 oC step. The optical properties of the ZnO films were studied using UV-VIS-NIR spectrometer. The effects of substrate temperature on the absorption coefficient, optical band gap, refractive index, , extinction coefficient, single-oscillator energy, dispersion energy, high- frequency refractive index, high- frequency dielectric constant, moments of the optical spectra , average oscillator strength and average oscillator wavelength of the ZnO thin films were investigated . It was found that, the substrate temperature for these investigated films plays an important rule for changing an optical properties and dispersion parameter results of these films.