Effect of laser energy density on ZnO / α- Al2O3 of films grown by pulsed laser deposition


In this work, Pulsed Laser Deposition (PLD) was employed for preparation of the thin films of Zinc Oxide on Sapphire α- Al2O3 (0001). The effect of laser energy density on the structure and optical characterizations of the ZnO films have been studied by X-Ray diffraction (XRD), and Scanning Electron Microscopy (SEM). The results showed that crystalline and (002)-oriented ZnO films were obtained at laser fluence 0.8, 1.6, and 2.4J/cm2 and the optimized growth ZnO films were at substrate temperature of 400 oC.Optical transmission for all films was around 85-90% within the visible region of the spectrum.