Fabrication and Characterization of Cu2S /Si Heterojunction Photodetector Based on Spray Pyrolysis of Cu2S on Si

Abstract

In the present work fabrication and characterization of Cu2S/Siheterojunction photodiodes made by spray pyrolysis method using aqueoussolution of CuCl2.2H2O onto n-type silicon substrates made. The externalquantum efficiency of heterojunction was ٣7% at wavelength of 850nm. Theexperimental results show peak relative responsivity around 100mA/w , andmaximum value of detectivity D* (2*1011cm.Hz1/2.w-1).