Data Acquisition of TiO2 for Optical Material by using Spectroscopic Ellipsometry Technique


An Ellipsometric experimental set up of SOPRA ES4G type with a powerfulWVASE software for the theoretical calculus of the Ellipsometry parameters. TheEllipsometry Technique can determine amplitude and phase information Ψ( and Δ)dependent on wavelength range 250 nm to 900 nm (1.5 - 5 eV), including originalpractical solutions, were developed. Encouraging results of TiO2 were obtained inapplying the simple Ellipsometric method of azimuths to determine the opticalconstants for TiO2 with this optoelectronic device.