Expert System Design of beam spot size measurements in FIB system

Abstract

This is a design of an expert system in thefocused ion beam optical system by using fuzzy logictechnique to build an intelligent agent. Present softwarehas been designed as an interpretation expert system,written in Visual C# for optimizing the calculation ofthree electrostatic lenses column. By using such rulebased engine, the axial potential distributions forelectrostatic fields undergo the constraints have beenused to find spot size focusing for ions in the imageplane which have values are very useful for getting anddesigning FIB model, over ranges of ion beam angles (5,10,30,50,75 and 100) mrad