Optical Properties of Thermally-Annealed Tin-Doped Indium Oxide Thin Films


In this work, results of thermal annealing of tin-doped indium oxide thin films were presented. The effect of thermal annealing of the optical characteristics of such films was introduced. These characteristics include transmission, absorption coefficient, absorption depth, type of band gap and the dominant absorption processes. Thermal annealing may improve the diffusion of Sn dopants in the In2O3 structure and hence affect the optical properties of the resulted structure. The Sn-doped In2O3 thin films are widely used in the optoelectronics and integrated optics architecture.