PROFLING OF LITHIUM AND POTASSIUM INTO SILICON

Abstract

The profiling of Lithium and Potassium into Silicon doped by electrodeposition from molten salts (LiBr,KI) have been studied for various timeand deposition current. For samples studied changing the deposition time andcurrent have a significant effect on the conductivity type and sheet resistancevariation. This has attributed to high value of solid solubility of Lithium andPotassium in Silicon. Also, surface concentration variation with depth isaffected significantly by variation in deposition time, particular for sampleswith deposition time of 7 mints. A junction was found to be at 156 micronfrom the surface.For constant deposition current diffusion profiles show twodistinguishing regions, one with large diffusivity and the second lessdiffusion constant