Characterization of Low-Pressure Argon and Nitrogen Discharge Plasmas Using Electrical Floating Probe Method


In this work, a low-pressure dc-discharge plasma is characterized by electrical floating probe method. To get sufficient working conditions for plasma electrical probe, a sweep voltage power supply was built. The plasma generation chamber was used to produce glow-discharge using nitrogen and argon gases at pressures of 0.03, 0.07 and 0.1 mbar. The current-voltage characteristics were performed using plasma probe and some calculations, such as electron temperature, plasma frequency and plasma species density, were carried out. The results obtained from I-V curve showed that electron temperature for argon and nitrogen plasmas was increased by increasing gas pressure.