TY - JOUR ID - TI - Analysis of Electron Transport Coefficients in SiH4 Gas Using Boltzmann Equation in the Presence of Applied Electric Field AU - Mohammad M. Othman AU - Sherzad Aziz Taha AU - Idrees Hadi Salih PY - 2019 VL - 31 IS - 1 SP - 77 EP - 88 JO - Zanco Journal of Pure and Applied Sciences مجلة زانكۆ للعلوم الصرفة والتطبيقية SN - 22180230 24123986 AB - Monosilane (SiH4) plasma has numerous applications in plasma processing, transport coefficients are better to understanding and modeling of these gas discharge processes. The electron swarms in a monosilane gas under influence of uniform electric field can be calculated using two term approximation of Boltzmann equation for the range 1 ≤ E/N ≤ 1000 Td (1 Td= 1x10-17 V.cm2). The effective ionization coefficient's (α-η)/N and electron swarm parameters are calculated and compared with experimental and theoretical values of drift velocity, characteristic energy, mean electron energy and ionization coefficient. The critical field strength (E/N)cr.is calculated from the effective ionization curves. A set of electron molecule collisions has been assembled for monsilane gas which gave a good fit between the calculated and experimental values over the range of E/N investigated. The calculated distribution functions (EEDF) are found to be non-Maxwellian, having energy variations which reflect the important electron / molecule energy exchange processes. In addition, the percentages of energy lost by different types of elastic and inelastic collisions are given as a function of electric field strength E/N.

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