TY - JOUR ID - TI - Effects of Dual-Magnetron Configuration on Electrical Characteristics of Argon Discharge Plasma AU - Unal Demraluğlu, Murat Selçan PY - 2022 VL - 18 IS - 2 SP - 17 EP - 22 JO - Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية SN - 18132065 23091673 AB - In this work, the effects of dual magnetron configuration on the electrical characteristics (mainly current-potential) of the argon discharge plasma were presented. These characteristics include the ion and electron currents when ion and electron temperatures are comparable in addition to the ion current when electron temperature is reasonably higher than the ion temperature. Dual magnetrons (i.e., magnetron on each electrode) can efficiently confine the charge carriers (ions and electrons) through the volume from electrode surface towards the center of inter-electrode distance. This effect may extend to the opposite electrode when sufficiently large values of magnetic flux densities are used. Employment of dual magnetron configuration has caused the ion current to increase by 50% while the electron current was increased by 100%.

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