TY - JOUR ID - TI - Effect of Substrate Temperature on the Structural and Morphological Properties of Nano-structure ZnO films by Pulsed Laser Deposition AU - Adawiya J. Haider AU - Afnan k. yousif PY - 2011 VL - 29 IS - 1 SP - 58 EP - 64 JO - Engineering and Technology Journal مجلة الهندسة والتكنولوجيا SN - 16816900 24120758 AB - In this work, ZnO thin films were grown on sapphire (0001) substrate byPulsed Laser Deposition using SHG with Q-switched Nd:YAG pulsed laser operationat 532nm in O2 gas ambient 5×10-2 mbar at different substrate temperatures varyingfrom room temperature to 500°C. The influence of the substrate temperature on thestructural and morphological properties of the films were investigated using XRD andSEM. As result, at substrate 400°C, a good quality and crystalline films were depositedthat exhibits an average grain size (XRD) of 22.42nm with an average grain size(SEM) of 21.31nm.

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