@Article{, title={Folding Photonic Nanostructures}, author={D. Gracias}, journal={Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية}, volume={9}, number={3}, pages={23-24}, year={2013}, abstract={An electron beam lithography and plasma etching process enables hands-free folding of functional metal-patterned dielectric structures with nanoscale dimensions.

} }