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Diagnostics of dusty plasma properties in planar magnetron sputtering device
Qusay A. Abbas
,
Raghad T. Ahmead
Iraqi Journal of Physics, 2015, Volume 13, Issue 26, Pages 64-75
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Planar magnetron
,
Dusty Plasma
,
Al dusts grain
,
Electric Discharge
,
Longmuir probe.
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