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Etch of Si-wafer using CF3Br plasma and KOH solution

Diyala Journal For Pure Science, 2012, Volume 8, Issue 3 - part 2, Pages 400-406
 

Anisotropic etching of poly-silicon wafer by using CF3Br plasma

Diyala Journal For Pure Science, 2010, Volume 6, Issue 1, Pages 368-374

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