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Electrical Discharge Characterization of Planar Sputtering System for Gold Target
Dawood Salman Ali
,
Saadi Khalaf Faihan
,
Mohammed Jwair Dathan
,
Mohammed Khammass Khalaf
Diyala Journal For Pure Science, 2019, Volume 15, Issue 1, Pages 1-8
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Dc discharge plasma
,
Gold target
,
Argon
,
Sputtering
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