Effect of Substrate Temperature on the Structural and Morphological Properties of Nano-structure ZnO films by Pulsed Laser Deposition
Abstract
In this work, ZnO thin films were grown on sapphire (0001) substrate byPulsed Laser Deposition using SHG with Q-switched Nd:YAG pulsed laser operationat 532nm in O2 gas ambient 5×10-2 mbar at different substrate temperatures varyingfrom room temperature to 500°C. The influence of the substrate temperature on thestructural and morphological properties of the films were investigated using XRD andSEM. As result, at substrate 400°C, a good quality and crystalline films were depositedthat exhibits an average grain size (XRD) of 22.42nm with an average grain size(SEM) of 21.31nm.
Keywords
PLD, ZnO films, Substrate temperature, Crystal quality, Grain size, Optical properties, Nanostructures, Nd: YAG Q-Switching, SHGMetrics