Oxygen Effect on Structural and Optical Properties of WO3 Films by Pulsed Laser Deposition


This work includes the deposition of WO3 as a thin film on glass substrates by pulsed laser deposition method. The influence of Oxygen pressure on the structural and optical properties of tungsten trioxide films was investigated. The X-ray diffraction results show that the structure of the films changes from amorphous to crystalline at an Oxygen pressure higher than 10-2 mbar. The color of WO3 films formed at Oxygen pressure of 10-2 mbar is translucent white and it changes to pale blue with increasing the Oxygen pressure. From UV-visible spectroscopy the distinct variations in the transmission spectra and optical energy gap of the thin films were also observed. The optical band gap of the prepared films determined at different Oxygen pressures and it is found to be 3-3.1-3.12 eV at Oxygen pressures of 10-2 -2×10-1 -5×10-1 mbar respectively.