Study of ZnO, SnO2 and Compounds ZTO Structures Synthesized for Gas-Detection

Abstract

Semiconductor-based metal oxide gas detector of five mixed Z:S from zinc chloride salt (0,25,50,75,100%) ratios with tin chloride salt, were fabricated on glass substrate by a spray pyrolysis technique with thickness were about ( 0.2 ±0.05 µm) using water soluble as precursors at a substrate temperature 500 Cº±5, 0.05 M ,and their gas sensing properties toward (CO2 , NO2 and SO2 gas at different concentration (10,100,1000 ppm) in air were investigated at room temperature which related with the petroleum industry. Furthermore structural and morphology properties was inspecting. Experimental results show that the mixing ratio affect the composition of formative oxides (ZnO,Zn2SnO4,Zn2SnO4+ZnSnO3,ZnSnO3, SnO2) ratios mentioned in the above respectively, and related with the sensitivity of the tested oxidation gases.