Numerical Simulation of Temperature Distribution during Short Pulse Laser Processing of Aluminum Thin Films

Abstract

Fourier equation does not accurately predict the transient temperature during microscale laser heating of thin films. Therefore, non-Fourier behaviors may be significant for such microscale applications as pulsed-laser processing of metal and semiconductors, thin-film applications, and even laser surgery. A numerical model is developed to represent the temperature distribution during ultra short pulsed laser processing of aluminum thin films. The model developed is based on the solution of non-Fourier heat conduction problem with different thermal fluxes using explicit finite differences method. A computer program Quick-Basic language was built to perform the solution. The results of Non-Fourier heat conduction equation were compared with the results of Fourier heat conduction equation and showed that when the time increased Non-Fourier equation will be Fourier equation. The results showed that when increased the heat flux greater than the problem convert from one-dimensional non-Fourier heat conduction to one-dimensional non-Fourier phase change.