Titanium Dioxide Doped with Tellurium Room-Temperature Gas Sensor

Abstract

Titanium dioxide thin films doped with Tellurium were deposited by chemical evaporation spray method. The electrical properties were studied at room temperature to detect NH3 and CO gases. The results of sensitivity as a function of doping concentration, gas volume, exposure time and responding-recovering dynamics were examined for both gases. The sensor showed best sensitivity at 0.075 gm doped with Tellurium, and its response for ammonia is better than carbon monoxide.