Enhancement of Porous Silicon Formation by Using Laser Irradiation

Abstract

In this work porous silicon where prepared by chemical etching assisted with laser. The structural and optical properties of porous silicon are investigated using atomic force microscopy (AFM) and FTIR spectroscope. FTIR spectrum exhibit the formation of SiHx (x=1,2) and Si-O bonds. The atomic force microscopy AFM investigation shows the surface roughness (RMS observed was 1.52nm with laser and 1. 86 nm without laser ) and pyramid like hillocks surface on entire surface which can be regarded as a condensation point to form small skeleton clusters which plays an important role for the strong visible luminescence.