Abstract

Our study concentrates on the surface diffusion which is a thermally activated process that initiated by heating the substrate. More specifically, the study will investigate the Si(001) surface temperature throughout laser-induced desorption process. The nonlinear inhomogeneous heat conduction equation is solved numerically in one dimension by using the finite differences method as long as the temperature dependence of the physical(optical and thermal) functions prevents an analytical solution. All the effects are incorporated and highlighted especially the temperature- diffusion dependence on position and time.

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The article was added to IASJ on 2015-03-14

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