Fabrication and Characterization of ZnO Gas Sensor

Abstract

In this paper thin films of zinc oxide ZnO was prepared by spray pyrolyess method with thickness were about ( 0.1 ±0.05 µm) on n-type silicon substrates at different deposition temperature (300,400,500) C°, from zinc chloride at concentrations (0.05,0.1) M as a sensor for pollutant gases like CO2 , NO2, and H2S related with oil manufacture .The crystallinity and morphology of the films were characterized by XRD, and optical microscopy was done on prepared films , addition to sensitivity to polluting gases previously mentioned at different test temperature (10-50) C°. Result shows that the crystallization increased by increasing deposition temperature(substrate temperature), and the sensitivity increased by rising both of the gas concentration or temperature.