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Methods of Determining The Refractive Index of Thin Solid Films (Review Article)

Author: S.K. Al-Ani
Journal: Iraqi Journal of Applied Physics المجلة العراقية للفيزياء التطبيقية ISSN: 18132065 23091673 Year: 2008 Volume: 4 Issue: 1 Pages: 17-23
Publisher: iraqi society for alternative and renewable energy sources and techniques الجمعية العراقية لمصادر وتقنيات الطاقة البديلة والمستجدة


Thin multilayer graded semiconducting, inorganic, metallic oxides films have wide applications such as optical designs and microelectronics industry. Knowledge of the refractive indices nf(λ) and of such films their dispersion are important. This paper is aimed to present an overview on the different methods that have been devised for the determination of the index of refraction of thin films along with their theoretical basis. Such methods are Abeles, Swanepoel, Kramers-Kronig, Ellipsometer, and others. Some experimental results are also presented. The accuracy of these methods is evaluated.

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