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Analytical Investigation of Charging Ability of Insulators under Electron Beam Irradiation inside SEM Chamber

Author: Hassan N. Al-Obaidi1, Ali S. Mahdi2
Journal: Almuthanna Journal of Pure Science (MJPS) مجلة المثنى للعلوم الصرفة ISSN: 22263284 Year: 2016 Volume: 3 Issue: 2
Publisher: Al-Muthanna University جامعة المثنى


An analytical procedure has been carried out to measure the charge that may trapped in an insulator sample andrelated electrostatic surface potential in sense of mirror effect phenomenon. In fact, scanning electron microscope mirrormethod (SEMME), sometimes called electron mirror method (EME) and/or magnification factor method (MFM), has beenused to accomplished that purpose. However, this work has been carried out concerning the theoretical point of view, themirror plot curve has been adopted as an evaluation scale for the quality of the mirror image. Therefore, this procedure hadbeen used to investigates the experimental mirror plot curves for PMMA material with different accelerating potential andstudying the most important parameters that affects in these curves. Results have clearly shows that the radius of irradiatedarea play an important rule in the shape of mirror plot figure and then the quality of the image.

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