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Sol–Gel Processed Zinc Oxide Film Deposited on Equilateral Prism As Optoelectronic Humidity Sensor

Author: Mustafa Shakir Hashim*, Reem Saadi Khaleel*, Hadi Ahmed Hussein*, Hussein Thamir Salloom**
Journal: Albahir journal مجلة الباهر ISSN: 23125721 Year: 2018 Volume: 7 Issue: 13-14 Pages: 65-71
Publisher: Shiite Endowment ديوان الوقف الشيعي

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Abstract

Zinc oxide film has been deposited on an equilateral prism using spin coating method. The sample is then annealed at (400) 0C for one hour. X-ray diffraction (XRD) confirms the formation ZnO polycrystalline structure with the unit cell parameters of a= (0.325) nm and c= (0.52) nm .The variations of both the transmittance and absorbance with wavelength in the range from (300) to (1100) nm is measured. The optical energy gap of the film is calculated from analysis of optical absorption. Based on output power modulation of reflected laser light, the humidity sensing of the deposited film is investigated at relative humidity (%RH) in the range (10–90) %. Three angles (45, 60 and 80) degree are used to apply the laser beam. The obtained results showed that the output power of reflected beam is increased with humidity. Maximum relative humidity was recorded at incidence angle Өi = (80) degree.

رﺳﺐ ﻏﺸﺎء اوﻛﺴﻴﺪ اﻟﺰﻧﻚ ﻋﲆ ﻣﻮﺷﻮر ﻣﺘﺴﺎوي اﻻوﺟﻪ ﺑﻄﺮﻳﻘﺔ اﻟﻄﻼء ﺑﺎﻟﱪم. ﻟﹸﺪﻧﺖ اﻟﻌﻴﻨﺔ ﺑﻌﺪ ذﻟﻚ ﺑﺪرﺟﺔ ﻟﺴﺎﻋﻪ واﺣﺪة. أﻛﺪ ﺣﻴﻮد اﻻﺷﻌﻪ اﻟﺴﻴﻨﻴﺔ ﺗﻜﻮن اﻟﱰﻛﻴﺐ اﳌﺘﻌﺪد اﻟﺘﺒﻠﻮر ﻷوﻛﺴﻴﺪ اﻟﺰﻧﻚ وﺑﻤﻌﻠﲈت 0(م400) . ﻗﻴﺴﺖ ﺗﻐﲑات اﻟﻨﻔﺎذﻳﺔ واﻻﻣﺘﺼﺎﺻﻴﺔ ﻣﻊ اﻟﻄﻮل اﳌﻮﺟﻲ c =(0.52) nm و a= (0.325) nmﺧﻠﻴﺔ وﺣﺪة . ﺣﺴﺒﺖ ﻓﺠﻮة اﻟﻄﺎﻗﺔ اﻟﺒﴫﻳﺔ ﻟﻠﻐﺸﺎء ﻣﻦ ﲢﻠﻴﻞ اﻻﻣﺘﺼﺎص اﻟﺒﴫي. nm (1100اﱃ )nm (300)ﺑﺎﳌﺪ￯ ﻣﻦ اﻋﺘﲈدا ﻋﲆ ﺗﻐﻴﲑ اﻟﻘﺪرة اﳋﺎرﺟﺔ ﻟﻀﻮء اﻟﻠﻴﺰر اﳌﻨﻌﻜﺲ أﺳﺘﻘﺼﻴﺖ ﺣﺴﺎﺳﻴﺔ اﻟﻐﺸﺎءاﳌﺮﺳﺐ ﻟﻠﺮﻃﻮﺑﺔ ﺑﻤﺪ￯ رﻃﻮﺑﺔ ( درﺟﺔ ﻻﺳﻘﺎط ﺷﻌﺎع اﻟﻠﻴﺰر. ﺑﻴﻨﺖ اﻟﻨﺘﺎﺋﺞ 80 و60 ، 45( %. اﺳﺘﻌﻤﻠﺖ ﺗﻼث زواﻳﺎ )90(اﱃ )10ﻧﺴﺒﻴﺔ ﻣﺎﺑﲔ ) اﳌﺴﺘﺤﺼﻠﺔ زﻳﺎدة اﻟﻘﺪرة اﳋﺎرﺟﺔ ﻟﻠﺸﻌﺎع اﳌﻨﻌﻜﺲ ﻣﻊ اﻟﺮﻃﻮﺑﺔ. ﺳﺠﻠﺖ اﻋﲆ ﻗﻴﻤﺔ ﻟﻠﺮﻃﻮﺑﺔ اﻟﻨﺴﺒﻴﺔ ﻋﻨﺪ زاوﻳﺔ ( درﺟﺔ.80ﺳﻘﻮط

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