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Study of Annealing Effect on the Some Physical Properties of Nanostructured TiO2 films prepared by PLD
دراسة تأثير التلدين على بعض الخصائص الفيزيائية للأغشية TiO2التركيب النانوي المصنعة بتقنية PLD

Authors: Ali A.Yousif علي احمد يوسف --- Sarmad S. Al-Obaidi سرمد العبيدي
Journal: Journal of College of Education مجلة كلية التربية ISSN: 18120380 Year: 2013 Issue: 3 Pages: 139-160
Publisher: Al-Mustansyriah University الجامعة المستنصرية


Nanostructured Titanium Dioxide (TiO2) thin films were prepared by pulsed laser deposition (PLD) on the glass substrates. The effects of different annealing temperature (400, 500 and 600 °C) towards the some physical properties such as structural, morphological and optical have been studied. From X-ray diffraction result, the crystallinity of TiO2 thin films improved at higher annealing temperature. It also could be observed that the rutile phase start to exist at annealing temperatures of 500 °C and 600 °C. The Full Width at Half Maximum (FWHM) of the (101) peaks of these films decreases from 0.450° to 0.301° with increasing of annealing temperature. AFM measurements confirmed that the films grown by this technique have good crystalline and homogeneous surface. The Root Mean Square (RMS) value of thin films surface roughness increased with increasing of the annealing temperature. From UV-VIS spectrophotometer measurements, the optical transmission results shows that theمجلة كلية التربية ............................................................. العدد الثالث 3102140transmission over than ~65% in the near-infrared region which decrease with the increasing of annealing temperatures. The allowed indirect optical band gap of the films was estimated to be in the range from 3.49 to 3.1 eV. The allowed direct band gap was found to decrease from 3.74 eV to 3.55 eV with the increase of annealing temperature. The refractive index of the films was found from 2.27 -2.98 at 550nm. The extinction coefficient, real and imaginary parts of the dielectric constant increase with annealing temperature.

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